Name of the equipment: RF Sputtering Make & Model: HIND HIGH VACUUM AUTO 500, D1307 I-Stem Registration ID- ……………………… Category of Instrument Sample Preparation Types of Analysis / Testing Sample Preparation Application: 1. Coating (Thin Films) 2. Semiconductor Industries 3. Biological / Polymer sample coating Description of Instrument RF sputtering is a physical vapor deposition (PVD) technique used to deposit thin films. It involves bombarding a target material with energetic ions, which then dislodge atoms that deposit on a substrate to form a thin film. RF sputtering utilizes radio frequency (RF) power to create and maintain a plasma, accelerating ions that impact the target
Book through I-STEM: https://www.istem.gov.in/ Slot Booking Link I-STEM Slot Booking link for External User		Booking available for Internal and External Both Requisition form for Internal External

Faculty In-charge: Dr. Soney Varghese Email ID: soneyva@nitc.ac.in Phone number:  +91-9446792019

Technical Staff: Anurag C (ST) anuragc@nitc.ac.in

Department MSED Office Email ID msedoffice@nitc.ac.in Location Room No. 101, Department of Materials Science and Engineering Lab Phone No 0495-2286528

Features of the equipment Ø RF (Radio Frequency) sputtering is a physical vapour deposition (PVD) technique used to deposit thin films by bombarding a target material with ions in a vacuum environment. It utilizes an alternating current (AC) power source at a radio frequency, typically 13.56 MHz, to create a plasma that accelerates ions to the target	Unique features/Measurement capabilities, if any
Instrument Technical Description and Major Specifications (This Specifications Limited to Major 5) 1. To identify Topography 2. To identify I/V Spectroscopy 3. To identify F-D Spectroscopy 4. To identify Nano Indentation	Measurement/Sample specifications: · Maximum Size · 2cm×2cm Film/Coated samples · No Liquid/Powder samples

Ø Login to the ISTEM portal and book the slot.

Ø Samples can be sent in the address,

Department of Materials Science and Engineering,

NIT Calicut,

NIT Campus PO-673601

                  Calicut, Kerala.

	Internal	External Academic Institutes	National R&D Lab	Industry
1.Coating (Thin Films) 2.Semiconduct or Industries 3.Biological / Polymer sample coating	500/hour + Target charges	1000/hour +   Target charges	1000/hour +   Target charges	2000/hour +   Target charges